![Eds analysis principle](https://kumkoniak.com/34.jpg)
The principle of X-ray generation.įigure 4649b. The initial holes can be generated by any energetic beams such as incident electrons in EMs, incident ions in FIB, and laser beams.įigure 4649a. Figures 4649a and 4649b shows the principle of X-ray generation in EDS detection. Simply speaking, inelastic scattering mainly involves electron-electron interactions and is mainly applied for analytical analyses such as EELS (electron energy loss spectroscopy) or EDS analysis. This excess energy, which is unique for every atomic transition, will be emitted by the excited atom either as an X-ray photon (for EDS measurement: Energy Dispersive X-ray Spectrum) or will be self-absorbed and emitted as an Auger electron (for AES measurement: Auger Electron Spectrum). To return the excited atom to its ground state, the electron from an outer, higher energy shell fills the vacant inner shell, and then the atom releases an amount of energy equal to the potential energy difference between the two shells. EDS is also referred to as Energy Dispersive X-ray (EDX) spectroscopy.Īn atom is ionized when an inner shell electron is removed by high-energy-electron radiation. EDS was first introduced in the 1960s, when the solid state detectors were first implanted to microanalyzers. Practical Electron Microscopy and Database -īefore the appearance of EDS (Energy Dispersive Spectrometry) systems, the WDS (wavelength-dispersive spectrometer) had been used for X-ray characterization. Energy Dispersive X-Ray Spectrometry (EDS/EDX)
![Eds analysis principle](https://kumkoniak.com/34.jpg)